Study on Dynamic Characterization and Vibration Reduction of Scrubber Structures Using Fluid Structure Interaction Analysis

A scrubber is an important structure in post-semiconductor processes. It impossible to completely modify the entire of already installed and operating if a vibration problem occurs. Therefore, it essential determine cause vibrations reinforce structure. Vibration majorly caused by pump, as considerable generated around analyze it. However, various equipment operated buildings where scrubbers are installed, data measured attaching sensors invalid owing surrounding problems. this study, on periphery pump according driving force was confirmed using two-way fluid interaction analysis. To end, case run conducted within changeable design range, efficient for reduction suggested comparing with change factor.